Terahertz radiation detector

We have designed and fabricated detectors of THz radiation based on bolometric principle. Though THz band is very important for applications in medicine, detection of explosives, etc., there is still lack of proper devices for generation and /or detection of THz waves. So, our microbolometer can be considered a substantial contribution to this field – it is miniature, has fast response, and works at room temperature, i.e., the clumsy cooling can be omitted. In its construction a long-term experience in fabrication of MEMS structures and also deposition of thin film structures of complex materials by PLD technique is applied. The microbolometers were successfully tested at PTB Berlin by THz radiation up to 1.4 THz. NIST in the USA has expressed an interest in our technology. More sophisticated microbolometers with enhanced sensitivity up to 10 THz are the subject of a new APVV project TERAMEMS (2015-2018).


Microbolometric detector of terahertz waves


Chromik, Š., Štrbik, V., Dobročka, E., Roch, T., Rosová, A., Španková, M., Lalinský, T., Vanko, G., Lobotka, P., Ralbovský, M., and Choleva, P.: LSMO thin films with high metal-insulator transition temperature on buffered SOI substrates for uncooled microbolometers, Applied Surface Sci 312 (2014) 30-33.
Chromik Š. et al., “Advanced perovskite thin films and structures for applications”, SURFINT-SREN IV November 23-26, 2015, Florence, Italy. Pozvaná prednáška.
Chromik, Š., Lalinský, T., Rýger, I., Vanko, G., Lobotka, P., Darmo, J., Mikulášek T., Pítra, K., Raida, R., Zehetner, J., Vrabček, P.: Uncooled microbolometer for THz radiation. Final workshop of EMRP New07 project on THz Security. May 29, 2015, Davos, Switzerland.
Lalinský, T., Chromik, Š., Lobotka, P., Rýger, I., Zehetner, J., Dzuba, J., and Vanko, G.: Uncooled MEMS detector of terahertz radiation. In: 41st International Conference on Micro-and Nano-Engineering. – MNE 2015. Hague 2015.