Electrical Characterization

The laboratory provides electrical characterization of four- and two-terminal semiconductor structures and devices (transistors, diodes, MOS, MIM, and TLM structures). Two independent fully-automated systems enable measurements of samples on wafer, as well as partially and fully packed devices and data analysis.

Equipment:

• Keithley 4200 Semiconductor Characterization System (3x SMU, PIV-A, PIV-Q, CVU)
• HP8114A 100 V / 2 A Programmable pulse generator (10 ns to 1 s pulse width)
• Agilent 4284A LCR Meter, Keithley 2400 SourceMeter and 6517A Electrometer
• Wentworth PML 8000 and MDC Hot-chuck probe-station (base-plate temperature RT – 200/300),
  Xe lamp SP ASB-XE-175EX (200 – 1100 nm) with set of metal interference filters and fiber
• Optický mikroskop ZEISS Axio Lab.A1

Application:

• DC and pulsed IV measurement of semiconductor structures and devices
• Capacitance-voltage and (light-assisted) capacitance-transient measurement, AC spectroscopy

Contact: M. Tapajna, Tel.: +421-2-5922 2777

Access: Individual access after introductory training (2 hours), online booking

Price:  0 Eur/hour for SAS employees

Documentation: 4200_SCS, 4200-CVU, 4200_PIV

Keithley 4200 semiconductor characterization system